| Parameter | Unit | ETR-F-401 |
|---|---|---|
| Pumping speed | L/S | 380 |
| Ultimate pressure | pa | <5±10-7 |
| Compression ratio | / | >5X103 |
| Inlet flange | / | DN160/ISO-K or CF |
| Outlet flange | / | DN25/ISO-KF,KF40 |
| Purge port | / | DN16/ISO-KF |
| Weight | kg | 10 |
| Vibration | um | ≤0.05 |
| Noise | dB | ≤55 |
| Bearing | / | Lubricated ceramic ball bearings with grease |
| Installation angle | / | Any angle |
| Work environment magnetic field | mT | ≤3 |
| Pre-pump recommendation | L/S | 3-8 |
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