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ETR-F-701 turbo molecular pump

ETR-F-701 turbo molecular pump

ETR-F-701 turbo molecular pump

ParameterUnitETR-F-701
Pumping speedL/S550
Ultimate pressurePa<5X10-6
Compression ratio/>1X104
Inlet flange/DN160/ISO-K或CF
Outlet flange/DN25/ISO-KF,KF40
Purge port/DN16/ISO-KF
Weightkg20
Vibrationum≤0.05
NoisedB≤50
Bearing/Grease-lubricated ceramic ball bearing
Installation angle/Any angle
Magnetic field in working environmentmT≤3
Pre-pump recommendationL/S4-10

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