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ETR-90 fully magnetic levitation molecular pump

ETR-90 fully magnetic levitation molecular pump

ETR-90 fully magnetic levitation molecular pump

ParameterUnitETR-90
Inlet flange/DN63 ISO-K
Outlet flange/DN16 ISO-KF
Cooling method/Air cooling
Ultimate pressurePa<8X10-5
Pumping speedL/S70
Rated speedrpm80000
Startup time/<2 minutes
Installation angle/Any angle
Vibrationum<0.02um
Contact method/RS-485
VoltageDC24V
Maximum powerW200
Qualitykg3.2

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