{"@pos1@":"사양","@pos2@":"최소","@pos3@":"일반","@pos4@":"최대","@pos5@":"단위","@pos6@":"조건","@pos7@":"측정 원리","@pos8@":"피라니 원리","@pos9@":"범위","@pos10@":"1","@pos11@":"1125000","@pos12@":"미크론","@pos13@":"공기,질소,산소,일산화탄소","@pos14@":"1.3X10 - 3","@pos15@":"1500","@pos16@":"mbar","@pos17@":"출력 전압","@pos18@":"10.23","@pos19@":"V","@pos20@":"출력 곡선","@pos21@":"0.6 - 10.23V "@pos45@":"VDC","@pos46@":"작동 전류","@pos47@":"22","@pos48@":"MA","@pos49@":"저항 식별","@pos50@":"71.5","@pos51@":"KΩ","@pos52@":"사전 설정","@pos53@":"작동 온도","@pos54@":"-40","@pos55@":"85","@pos56@":"℃","@pos57@":"저장 온도","@pos58@":"-40","@pos59@":"90","@pos60@":"℃","@pos61@":"프로브 재료","@pos62@":"스테인레스 스틸 316F, FR4, 유리, 실리콘, 니켈, 구리"}