| Parameter | Unit | ETR-F-100 |
|---|---|---|
| Pumping speed | L/S | 300 |
| Ultimate pressure | pa | <5±10-6 |
| Compression ratio | / | >1X1010 |
| Inlet flange | / | DN100/ISO or CF |
| Outlet flange | / | DN25/ISO-KF,KF40 |
| Purge port | / | DN16/ISO-KF |
| Weight | kg | 9.6 |
| Vibration | um | ≤0.05 |
| Noise | dB | ≤55 |
| Bearing | / | Grease-lubricated ceramic ball bearing |
| Installation angle | / | Any angle |
| Magnetic field in working environment | mT | ≤3 |
| Pre-pump recommendation | L/S | 2-6 |
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