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ETR-F-2201 turbo molecular pump

ETR-F-2201 turbo molecular pump

ETR-F-2201 turbo molecular pump

ParameterUnitETR-F-2201
Pumping speedL/S1800
Ultimate pressurepa<5X10-6
Compression ratio/>1X104
Inlet flange/DN250/ISO-K或CF
Outlet flange/DN40/ISO-KF,KF50
Purge port/
DN16/ISO-KF
Weightkg45
Vibrationum≤0.05
NoisedB≤50
Bearing/Grease-lubricated ceramic ball bearing
Installation angle/Any angle
Magnetic field in working environmentmT≤3
Pre-pump recommendationL/S16-24

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