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ETR-F-200 turbo molecular pump

ETR-F-200 turbo molecular pump

ETR-F-200 turbo molecular pump

ParameterUnitETR-F-200
Pumping speedL/S1350
Ultimate pressurepa<5X10-6
Compression ratio/>1X1011
Inlet flange/DN200/ISO-K or CF
Outlet flange/DN40/ISO-KF,KF50
Purge port/DN16/ISO-KF
Weightkg30
Vibrationum≤0.05
NoisedB≤50
Bearing/Grease-lubricated ceramic ball bearing
Installation angle/Any angle
Magnetic field in working environmentmT≤3
Pre-pump recommendationL/S8-16

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