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ETR-F-160 turbo molecular pump

ETR-F-160 turbo molecular pump

ETR-F-160 turbo molecular pump

ParameterUnitETR-F-160
Pumping speedL/S460
Ultimate pressurepa<5±10-7
Compression ratio/>1X1010
Inlet flange/DN160/ISO-K
Outlet flange/DN25/ISO-KF,KF40
Purge port/DN16/ISO-KF
Weightkg10
Vibrationum≤0.05
NoisedB≤55
Bearing/Grease-lubricated ceramic ball bearing
Installation angle/Any angle
Magnetic field in working environmentmT≤3
Pre-pump recommendationL/S3-8

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