| Parameter | Unit | ETR-F-63 |
|---|---|---|
| Pumping speed | L/S | 85 |
| Ultimate pressure | pa | <8X10-6 |
| Compression ratio | / | 108 |
| Inlet flange | / | LF63:CF63 or other customized interfaces |
| Outlet flange | / | KF16 |
| Purge port | / | KF16 |
| Weight | kg | 2.3 |
| Vibration | um | ≤0.05 |
| Noise | dB | ≤60 |
| Bearing | / | Grease-lubricated ceramic ball bearing |
| Installation angle | / | Any angle |
| Cooling method | / | Air cooling/water cooling/natural convection |
| Pre-pump recommendation | L/S | 0.5-2 |
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