{"@pos1@":"매개변수","@pos2@":"단위","@pos3@":"ETR - F - 63","@pos4@":"펌핑 속도","@pos5@":"L/s","@pos6@":"85","@pos7@":"극한 압력","@pos8@":"Pa","@pos9@":"<8X10 - 6","@pos10@":"압축비","@pos11@":"\/","@pos12@":"108","@pos13@":"입구 플랜지","@pos14@":"\/","@pos15@":"LF63:CF63 또는 기타 맞춤형 인터페이스","@pos16@":"출구 플랜지","@pos17@":"\/","@pos18@":"KF16","@pos19@":"퍼지 포트","@pos20@":"\/","@pos21@":"KF63